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Large equipment Clusters „Quantum“

Electron-beam lithography system: Raith eLine plus

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JKU - Johannes Kepler University Linz

Linz | Website

Open for Collaboration

Short Description

System for the fabrication of nanostructures by means of electron-beam lithography

Contact Person

Univ.-Prof. Dr. Armando Rastelli

Research Services

Electron-beam lithography (30 kV acceleration voltage) on substrates up to 4 inch diameter; laser stage with 10nm accuracy

Methods & Expertise for Research Infrastructure

Electron-beam-lithography, Nanostructuring

Allocation to research infrastructure

Zentrum für Halbleiter Nanostrukturen

Terms of Use

Please contact us

Cooperation Partners

IST Austria
Univ. Pavia
Univ. Rom la Sapienza
Univ. Innsbruck
Univ. Würzburg
Univ. Paderborn
KTH Stockholm

Reference Publications

Heavy-Hole States in Germanium Hut Wires
Hannes Watzinger, Christoph Kloeffel, Lada Vukušić, Marta D. Rossell, Violetta Sessi, Josip Kukučka, Raimund Kirchschlager, Elisabeth Lausecker, Alisha Truhlar, Martin Glaser, Armando Rastelli, Andreas Fuhrer, Daniel Loss, and Georgios Katsaros
Nano Lett., 2016, 16 (11), pp 6879–6885
http://dx.doi.org/10.1021/acs.nanolett.6b02715

Enhanced telecom emission from single group-IV quantum dots by precise CMOS-compatible positioning in photonic crystal cavities
Magdalena Schatzl, Florian Hackl, Martin Glaser, Patrick Rauter, Moritz Brehm, Lukas Spindlberger, Angelica Simbula, Matteo Galli, Thomas Fromherz, and Friedrich Schäffler
ACS Photonics 2017
http://dx.doi.org/10.1021/acsphotonics.6b01045

Contact

Univ.-Prof. Dr. Armando Rastelli
Institut für Halbleiter- und Festkörperphysik, Abteilung für Halbleiterphysik
+43 732 2468 9601
armando.rastelli@jku.at
https://www.jku.at/hfp

Location

Location on map

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