Short Description
Lab-sized arc evaporation system (bottom up) with a central VTD cathode with the following characteristics:
- 6" target diameter
- currents in the range of 0 - 200 A
- Arc ignition by means of a mechanical trigger
- Direct water cooling of the back of the target
- Direct water-cooled anode
- Operation of the cathode: steered or random
- Motorised readjustment of the cathode magnetic field for arc control
- "Skimmershield" for the collection of macro particles
Parallel and centralised height-adjustable substrate holder (with bias and etching voltage supply).
Contact Person
Univ.Prof. Dr. Paul Mayrhofer
Research Services
The HELGA research infrastructure is available for collaborative research projects with academic and industrial partners. Services include the deposition of tailored thin films, the development of novel coating concepts, and feasibility studies for specific applications.
In addition, the facility supports the education and training of students and doctoral researchers in physical vapor deposition and thin film technologies. Access is typically provided within the framework of joint research projects.
Methods & Expertise for Research Infrastructure
The HELGA coating system is a homebuilt PVD arc evaporation facility equipped with one 6-inch cathode including a skimmer shield for the deposition of functional and protective thin films. The system enables controlled deposition of metallic, nitride, oxynitride, and carbon-containing hard coatings using argon as well as reactive gases such as N2 and O2, with optional C2H2.
The infrastructure allows precise tailoring of coating composition, microstructure, and residual stress state by systematic variation of process parameters such as arc current, gas flow, substrate bias, and temperature. A strong focus lies on the development of compositionally complex coating systems, including multi-component and high-entropy coatings, and on studying structure–property relationships.
The system is primarily used for both fundamental and application-oriented research on wear-, corrosion-, and temperature-resistant thin films.
Independent use without scientific supervision is not intended. Issues related to costs, intellectual property, and publication are regulated on a project-specific basis.