Short Description
Plasma/Vacuum system for combined processes: thin film deposition (sputtering of metals and dielectrics), etching (reactive ion etchng), and plasma-polymerization.
Contact Person
Assoz.- Prof. Dr. Wolfgang Hilber
Research Services
thin film technology, thick film technology, functional materials, sensors and actuators
Methods & Expertise for Research Infrastructure
Realization of miniaturized sensors and actuators based on thin film technology.
Allocation to research infrastructure
after consultation with the research institute IME at the JKU