Short Description
Physical vapour deposition system combining sputtering and e-beam evaporation
Contact Person
Amalio Fernandez-Pacheco
Research Services
Deposition of thin films and multilayers in ultra-high vacuum.
Methods & Expertise for Research Infrastructure
Technical stuff performing the process of depositing multilayers in ultra-high vacuum. Metals and insulators possible.
Terms of use currently not established. Please contact the indicated contact person.