Short Description
MicroWriter ML3 Baby 365 is a compact, high performance , low cost direct-write optical lithography footprint.
Contact Person
Milena Petkova
Research Services
There are currently no research services offered for this research infrastructure. If you are interested in cooperation, please contact Markus Aspelmeyer (aspelmeyer-office@univie.ac.at).
Methods & Expertise for Research Infrastructure
The Durham Microwriter „Baby“ allows direct optical lithography for chip samples and wafer-scale patterns. The system is based on digital light projection, allowing rapid prototyping with high precision. The system reaches sum-micrometre resolution, and provides rapid, automated alignment to the substrates. For our research in quantum technology, the system is used to pattern conducting, superconducting, and dielectric structures on substrates including silicon, diamond, and silicon carbide.