Trockenätzanlage mit induktiv gekoppeltem Plasma
JKU - Johannes Kepler University Linz
Dry etching system for III-V compound semiconductors
Atomic Layer Depostion
Institute of Science and Technology Austria (ISTA)
The Oxford FlexAL systems provide a new range of flexibility and capability in the engineering...
Scanning Electron Microscope
Institute of Science and Technology Austria (ISTA)
The FEI SEM combines high- and low-voltage ultra-high resolution capabilities with a non-immersion lens design...
ICP-RIE etcher (F)
Institute of Science and Technology Austria (ISTA)
Inductively Coupled Plasma RIE (ICP-RIE) is an etch technology often used in specialty semiconductor markets...
Electro Beam Lithography
Institute of Science and Technology Austria (ISTA)
The EBPG5150 electron beam lithography system is designed for high-resolution and high-accuracy patterning of devices...
Atomic Force Microscope
Institute of Science and Technology Austria (ISTA)
The Atomic Force microscopy (AFM) is one of the most important tools for imaging, measuring,...
ICP-RIE etcher (Cl)
Institute of Science and Technology Austria (ISTA)
Inductively Coupled Plasma RIE (ICP-RIE) is an etch technology often used in specialty semiconductor markets...
Inverted Widefield Microscope (Ti-2)
Institute of Science and Technology Austria (ISTA)
Widefield Fluorescent Microscope Lumencor SpectraX light source Motorised stage Single cameras setup Temperature control chamber...
Widefield Microscope: Ti-2E - Inverted
Institute of Science and Technology Austria (ISTA)
Widefield Fluorescent Microscope Lumencor light source Motorised stage Single cameras setup Temperature control chamber Automated...
Inverted Widefield Microscope + Micropatterning System (Ti2E-03 PRIMO)
Institute of Science and Technology Austria (ISTA)
Widefield Fluorescent Microscope Fluorescent light source Motorized stage Single cameras setup Temperature control chamber Automated...
Lightsheet Microscope (LS7)
Institute of Science and Technology Austria (ISTA)
Chamber Climate Control (Humidity – CO2 and O2 control. Sample chambers: i) water / live;...
Mask Aligner
Institute of Science and Technology Austria (ISTA)
The EVG 610 is a semi-automated system that can handle small substrate pieces and wafers...
Multimodal Microscope: Dragonfly 505 - Inverted
Institute of Science and Technology Austria (ISTA)
multimodal multi-point confocal (WF/SD/TIRF/SRRF/SMLM)
Multiphoton Microscope: SP8 DIVE CS FALCON – upright
Institute of Science and Technology Austria (ISTA)
Upright multi-photon Scanning confocal microscope with tunable IR & fixed 1045nm laser lines, fluorescent life...
Raman Spectrometer
Institute of Science and Technology Austria (ISTA)
The Renishaw InVia Qontor upright confocal Raman instrument offers a variety of measurement options, such...
TIRF / FRAP Microscope (Visitron)
Institute of Science and Technology Austria (ISTA)
Ring TIRF / FRAP microscope
Plasma Xenon Focus Ion Beam
Institute of Science and Technology Austria (ISTA)
The PFIB dual beam system, installed at IST Austria, combines a FIB column with an...
IX83/TIRF Microscope (Olympus)
Institute of Science and Technology Austria (ISTA)
IX83/TIRF microscope (Olympus)
Spinning Disk Microscope: CSU-W1-02
Institute of Science and Technology Austria (ISTA)
The Nikon CSU W1-02 spinning disk microscope is an large Field Of View (17 x...
Spinning Disk Microscope: CSU-W1-03
Institute of Science and Technology Austria (ISTA)
The Nikon CSU W1-03 spinning disk microscope is a large Field Of View (17 x...
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