Trockenätzanlage mit induktiv gekoppeltem Plasma
JKU - Johannes Kepler University Linz
Dry etching system for III-V compound semiconductors
Atomic Layer Depostion
Institute of Science and Technology Austria (ISTA)
The Oxford FlexAL systems provide a new range of flexibility and capability in the engineering...
Scanning Electron Microscope
Institute of Science and Technology Austria (ISTA)
The FEI SEM combines high- and low-voltage ultra-high resolution capabilities with a non-immersion lens design...
ICP-RIE etcher (F)
Institute of Science and Technology Austria (ISTA)
Inductively Coupled Plasma RIE (ICP-RIE) is an etch technology often used in specialty semiconductor markets...
Electro Beam Lithography
Institute of Science and Technology Austria (ISTA)
The EBPG5150 electron beam lithography system is designed for high-resolution and high-accuracy patterning of devices...
Atomic Force Microscope
Institute of Science and Technology Austria (ISTA)
The Atomic Force microscopy (AFM) is one of the most important tools for imaging, measuring,...
ICP-RIE etcher (Cl)
Institute of Science and Technology Austria (ISTA)
Inductively Coupled Plasma RIE (ICP-RIE) is an etch technology often used in specialty semiconductor markets...
Inverted Widefield Microscope (Ti-2)
Institute of Science and Technology Austria (ISTA)
Widefield Fluorescent Microscope Lumencor SpectraX light source Motorised stage Single cameras setup Temperature control chamber...
Widefield Microscope: Ti-2E - Inverted
Institute of Science and Technology Austria (ISTA)
Widefield Fluorescent Microscope Lumencor light source Motorised stage Single cameras setup Temperature control chamber Automated...
Inverted Widefield Microscope + Micropatterning System (Ti2E-03 PRIMO)
Institute of Science and Technology Austria (ISTA)
Widefield Fluorescent Microscope Fluorescent light source Motorized stage Single cameras setup Temperature control chamber Automated...
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