Kurzbeschreibung
Our new established Nanofabrication Facility has opened its cleanroom in Q1 2017. It provides a cleanroom space of 420 sqm of new ISO 7 (class 10000), ISO 6 (class 1000) and with specific areas ISO 5 (class 100) - equipped with all the state of the art nanofabrication facilities.
The Nanofabrication Facility provides tools to researchers and students to support them in their research. Furthermore, it develops, optimizes and maintains micro- and nanofabrication processes.
Ansprechperson
Dr. Salvatore Bagiante
Research Services
Physics, Microfluidics
Methoden & Expertise zur Forschungsinfrastruktur
Micro- and nanofabrication processing, development of new processes, characterization, training
Equipment
- Mask Aligner
- Scanning Electron Microscope
- High Vaccum Evaporator
- Ultra-High Vaccum Evaporator
- Atomic Layer Depostion
- Electro Beam Lithography
- HF Vapour Etcher
- ICP-RIE etcher (F)
- ICP-RIE etcher (Cl)
- Atomic Force Microscope
- Plasma Xenon Focus Ion Beam
- ATC-2200-UHV Sputtering System
- ATC-ORION 8 UHV Sputtering System
- Physical property measurement system QD
- NanoOne 1000
- Raman Spectrometer
Information on terms of use, cooperation and fees is provided upon request. All such information is defined in a scientific collaboration agreement.