Sputter Cluster
Silicon Austria Labs GmbH (SAL)
Magnetron sputtering clustertool for various thin film single and multilayers on 200 mm wafers.
Oxford ICP RIE Bosch 418441
Silicon Austria Labs GmbH (SAL)
Bosch dry etching Tool. 8“ wafers etch with ESC clamping. 6“ and 4” wafers with...
Oscilloscope Keysight Infiniium UXR0804a
Silicon Austria Labs GmbH (SAL)
The Infiniium UXR-Series oscilloscopes deliver world-leading performance, ultra-low noise, and high signal fidelity for engineers...
Oxford ICP RIE Cl -based 418499
Silicon Austria Labs GmbH (SAL)
Multiple purpose versatile etching tool for WBG materials and metal etching.
Panalytical XRD
Silicon Austria Labs GmbH (SAL)
The PANalytical X’Pert Pro is a multipurpose x-ray diffractometer equipped with a Cu Kα source....
Oxford PECVD 418440
Silicon Austria Labs GmbH (SAL)
Oxford Instruments' PlasmaPro®100 PECVD (Plasma Enhanced Chemical Vapour Deposition) is a versatile instrument that can...
M8199A Arbitrary Waveform Generator
Silicon Austria Labs GmbH (SAL)
The M8199A arbitrary waveform generator (AWG) provides a high-performance signal source for arbitrary signals, enabling...
Pyrolysator
University of Natural Resources and Life Sciences Vienna (BOKU)
Pyrolysis is used to determine the composition complex, solid samples. A few microgram sample of...
Laborautomatisation
University of Natural Resources and Life Sciences Vienna (BOKU)
The unit provides high throughput biomonitoring with an assembly of an automatic incubator (Cytomat 2C)...
Konfokalmikroskop
University of Natural Resources and Life Sciences Vienna (BOKU)
High-performance fluorescence microscope for the optical quantification of intracellular processes and reactions in plants and...
Thin Film Deposition Leybold UNIVEX 900
Silicon Austria Labs GmbH (SAL)
Thin-film deposition tool with manual loading of single wafers up to 200mm.
PA NIR/MIR-FTIR
University of Natural Resources and Life Sciences Vienna (BOKU)
Our version of the Invenio-X covers a spectral range from 15.500 - 350 cm-1 (near-infrared...
2D - Gelpermeationschromatographie
University of Natural Resources and Life Sciences Vienna (BOKU)
By combining two separation methods (2D chromatography), complex samples can be described in more depth....
Ionenchromatograph
University of Natural Resources and Life Sciences Vienna (BOKU)
Ion chromatography is used to separate small, charged molecules to determine their content in a...
Infrared Spectrometer
University of Natural Resources and Life Sciences Vienna (BOKU)
Infrared spectrometry allows the non-destructive determination of a sample's composition within seconds. With matching calibrations,...
EVG Smart View
Silicon Austria Labs GmbH (SAL)
The SmartView NT automated bond alignment system for universal alignment offers a proprietary method for...
High Performance Thin Layer Chromatography (HPTLC)
University of Natural Resources and Life Sciences Vienna (BOKU)
This system consists of the Automatic TLC Sampler 4 (ATS 4) for automatic band and...
EVG Bond & Alignment System
Silicon Austria Labs GmbH (SAL)
Bond alignment system for universal alignment with proprietary method for micron-level face-to-face wafer alignment.
Tandem-Massenspektrometer (ESI-MS/MS)
University of Natural Resources and Life Sciences Vienna (BOKU)
An Agilent 1290 UHPLC system (using reversed phase or HILIC columns) or a Thermo/Dionex Integrion...
Heidelberg DWL 66
Silicon Austria Labs GmbH (SAL)
This Laser lithography system is a highly versatile, high-resolution pattern generator for direct writing and...
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