Trockenätzanlage mit induktiv gekoppeltem Plasma
JKU - Johannes Kepler University Linz
Dry etching system for III-V compound semiconductors
Atomic Layer Depostion
Institute of Science and Technology Austria (ISTA)
The Oxford FlexAL systems provide a new range of flexibility and capability in the engineering...
Scanning Electron Microscope
Institute of Science and Technology Austria (ISTA)
The FEI SEM combines high- and low-voltage ultra-high resolution capabilities with a non-immersion lens design...
ICP-RIE etcher (F)
Institute of Science and Technology Austria (ISTA)
Inductively Coupled Plasma RIE (ICP-RIE) is an etch technology often used in specialty semiconductor markets...
Electro Beam Lithography
Institute of Science and Technology Austria (ISTA)
The EBPG5150 electron beam lithography system is designed for high-resolution and high-accuracy patterning of devices...
Atomic Force Microscope
Institute of Science and Technology Austria (ISTA)
The Atomic Force microscopy (AFM) is one of the most important tools for imaging, measuring,...
Inverted Widefield Microscope
Institute of Science and Technology Austria (ISTA)
Widefield Fluorescent Microscope Lumencor SpectraX light source Motorised stage Two cameras, color (Nikon DS-FI) and...
ICP-RIE etcher (Cl)
Institute of Science and Technology Austria (ISTA)
Inductively Coupled Plasma RIE (ICP-RIE) is an etch technology often used in specialty semiconductor markets...
Inverted Widefield Microscope (Ti-2)
Institute of Science and Technology Austria (ISTA)
Widefield Fluorescent Microscope Lumencor SpectraX light source Motorised stage Single cameras setup Temperature control chamber...
Widefield Microscope: Ti-2E - Inverted
Institute of Science and Technology Austria (ISTA)
Widefield Fluorescent Microscope Lumencor light source Motorised stage Single cameras setup Temperature control chamber Automated...
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